KLA/Tencor RS-75 Resistivity Mapping System from Tech-Semi, Inc.
Fully Refurbished , Meet OEM Specifications.
Analyze sheet resistance data, on various conductive layers such as implants, diffusion, epi, CVD, metals, and bulk substrates
Provides accurate and repeatable sheet resistance measurements, from 5 m ohm/sq to 5M ohm/sq on 2-inch to 8-inch wafers, by uniting sophisticated modeling algorithms,advanced analysis techniques, and precision electronics.
Optional 100mm - 200mm Open Cassette
Cassette to cassette handling
Measurement Range: 5mΩ/sq - 5MΩ/sq
Repeatability (VLSI): < 0.2% (1σ)
Accuracy (VLSI): ±1%
Edge Exclusion: 3mm from edge of film
Throughput (5-site): 100WPH
Alignment System: Notch/Flat aligner on Probe Arm
Computer OS: DOS Software: Rev 6.22
SPECIAL OFFER 1+1=3
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